Run-to-Run Control in Semiconductor Manufacturing Editor(s): James Moyne, University of Michigan, Ann Arbor, USA;
Enrique del Castillo, Pennsylvania State University, University Park, USA;
Arnon M. Hurwitz, Friendswood, Texas, USA
Price:$134.95 Cat. #: 1178 ISBN: 9780849311789 ISBN 10: 0849311780 Publication Date: November 30, 2000
Number of Pages: 368
Availability: In Stock
Binding(s): Hardback
